MOVPE growth of GaP on Si with As initial coverage
نویسندگان
چکیده
منابع مشابه
Competitive growth mechanisms of AlN on Si (111) by MOVPE
To improve the growth rate and crystal quality of AlN, the competitive growth mechanisms of AlN under different parameters were studied. The mass transport limited mechanism was competed with the gas-phase parasitic reaction and became dominated at low reactor pressure. The mechanism of strain relaxation at the AlN/Si interface was studied by transmission electron microscopy (TEM). Improved dep...
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ژورنال
عنوان ژورنال: Journal of Crystal Growth
سال: 2017
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2016.11.077